Equipment:

High resolution X-ray diffractometer X'Pert PRO MRD (PANalytical, Netherlands)
with a set of X-ray optic components for use in standard coplanar diffraction scheme,
grazing incidence x-ray diffraction scheme and for reflectometry.

Features of the complex:

• determination the concentration of 2-component solid solutions and the level of residual elastic strain in epitaxial layers GeSi; InGaAs; GaAsN and others.
• determination the parameters of multilayer epitaxial structures by X-ray diffraction: the thickness of the layers, structure, periodicity.
• measurements of parameters and structure of crystallites in amorphous and crystalline matrices, including Si in SiO_x.
• determination of parameters for multilayer mirrors using X-ray reflectometry  of layers thickness, period and dispersion.