Equipment:
High resolution X-ray diffractometer X'Pert PRO MRD (PANalytical, Netherlands) with a set of X-ray optic components for use in standard coplanar diffraction scheme, grazing incidence x-ray diffraction scheme and for reflectometry.
Features of the complex:
- determination the concentration of 2-component solid solutions and the level of residual elastic strain in epitaxial layers GeSi; InGaAs; GaAsN and others.
- determination the parameters of multilayer epitaxial structures by X-ray diffraction: the thickness of the layers, structure, periodicity.
- measurements of parameters and structure of crystallites in amorphous and crystalline matrices, including Si in SiOx.
- determination of parameters for multilayer mirrors using X-ray reflectometry of layers thickness, period and dispersion.
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